Slit Valve Door vs. Gate Valve – Key Differences and...

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2026-03-28 08:12:24 -

Slit Valve Door vs. Gate Valve – Key Differences and Applications

When designing a vacuum system for semiconductor equipment, engineers often choose between a slit valve door and a vacuum gate valve. While both serve the purpose of isolating vacuum chambers, they differ significantly in design, footprint, and application. Slit Valve Door Design: A slit valve uses a narrow, slot‑shaped opening. The door moves vertically or in a...

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