Electrostatic Chuck: Complete Guide to Wafer Holding Technology

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2026-04-24 03:22:15 -

Electrostatic Chuck: Complete Guide to Wafer Holding Technology Introduction An Electrostatic Chuck (ESC) is a precision wafer holding device that uses electrostatic force to secure semiconductor wafers during processing. Unlike mechanical clamps or vacuum chucks, ESC technology provides contact-free wafer retention, eliminating particle contamination and enabling ultra-precision...

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