Load Port Module: An Essential Component for Smooth Semiconductor...

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2024-05-22 10:20:11 -

Load Port Module: An Essential Component for Smooth Semiconductor Wafer Fabrication

History and Evolution The concept of loadlock for semiconductor wafer fabrication dates back to the 1970s when Intel developed one of the first commercial wafer fabrication facilities. This early load port design consisted of a simple mechanical mechanism to load and unload wafers into process tools in a cleanroom environment. Over time, the capabilities of load ports evolved to include things...

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