55 μm can be achieved. Our results provide design insight toward fully exploiting a single-mode, wide-band, and ultra low-loss HC-ARF. In addition, the extraordinary optical properties of the proposed fiber can be beneficial for several applications such as future optical communication system, high energy light transport, extreme non-nonlinear optics and beyond.Defect inspection on lithographic substrates, masks, reticles, and wafers is an important quality assurance process in semiconductor manufacturing. Coherent Fourier scatterometry (CFS) using laser beams with a Gaussian spatial profile is the standard workhorse routinely used as an in-line inspection tool to achieve high throughput. As the semiconductor industry advances toward shrinking critical dimensions in high volume manufacturing using extreme ultraviolet lithography, new techniques that enable high-sensitivity, high-throughput, and in-line inspection are critically needed. Here we introduce a set of novel defect inspection techniques based on bright-field CFS using coherent beams that carry orbital angular momentum (OAM). One of these techniques, the differential OAM CFS, is particularly unique because it does not rely on referencing to a pre-established database in the case of regularly patterned structures with reflection symmetry. The differential OAM CFS exploits OAM beams with opposite wavefront or phase helicity to provide contrast in the presence of detects. We numerically investigated the performance of these techniques on both amplitude and phase defects and demonstrated their superior advantages-up to an order of magnitude higher in signal-to-noise ratio-over the conventional Gaussian beam CFS. These new techniques will enable increased sensitivity and robustness for in-line nanoscale defect inspection and the concept could also benefit x-ray scattering and scatterometry in general.The optical properties of microlens arrays may be significantly affected by the optical crosstalk effect between adjacent lenses. Recently, this issue has triggered increasing attention in the scientific community. In this study, an integrated microlens array (MLA) consisting of self-aligning convergent waveguides of microlenses was fabricated. The optical crosstalk effect does not influence the performance of such system. Based on the self-focusing effect principle, self-writing of the waveguide array was achieved in a photosensitive polymer. The light collection and guiding performance of the MLA with and without thermal cross-linking treatment was analyzed in depth. The relation between the stray light and the filling rate of the MLA shows that a high filling rate decreases the optical crosstalk. Finally, an integrated MLA with a large area, high uniformity, and excellent optical performance was fabricated.The directional polarimetric camera (DPC) is a polarization sensor with the characteristics of ultra-wide-angle and low-distortion imaging. The multi-angle polarization information is helpful to obtain the spatial distribution of target radiation, and multiple data fusion relies on the non-uniformity calibration of image plane. https://www.selleckchem.com/products/CHR-2797(Tosedostat).html The non-uniformity consists of many factors such as lens, detector assembly, spatial stray light, etc. The single correction method can not distinguish the error source effectively. In consideration of the in-flight operation mode of DPC based on the adjustment of exposure time, the non-uniformity correction method of the detector based on multi parameters is proposed. Through the electro-optical performance measurement system of the CCD detector, the sensitive factors such as temperature, dark current, exposure time and spectral response are obtained. After a series of preprocessing of the image including removal of dark signal, removal of smearing effect and temperature compensation, the non-uniformity calibration based on multi-parameters is imposed on the detector. The low-frequency unbalanced response difference of the image surface is eliminated, and the high-frequency difference is effectively suppressed. The experimental results show that the photo response non-uniformity of 95% full well single frame data is reduced from 2.86% to 0.36%. After correction, the data noise is shown as shot noise, and the detector has good ability of dynamic range adjustment. The non-uniformity calibration by the proposed method can offer data support for the instrumental calibration and in-flight fast calculation, and provide effective reference for the subsequent polarization remote sensing instruments.Deep neural network has been used to compensate the nonlinear distortion in the field of underwater visible light communication (UVLC) system. Considering the tradeoff between the equalization performance and the network complexity is the priority in practical applications. In this paper, we propose a novel hybrid frequency domain aided temporal convolutional neural network (TFCNN) with attention scheme as the post-equalizer in CAP modulated UVLC system. Experiments illustrate that the proposed TFCNN can achieve better equalization performance and remain the bit error rate (BER) below the 7% hard-decision forward error correction (HD-FEC) limit of 3.8×10-3 when other equalizers loss effectiveness under serious distortion condition. Compared with the standard deep neural network, TFCNN shows 76.4% network parameters complexity reduction.Metamaterial absorbers can achieve high-efficiency electromagnetic absorption in a specific band, which have been used in biochemical sensing, photoelectric detection, imaging and other fields. Tunable metamaterial absorbers provide more possibilities for the development of multifunctional electromagnetic absorption devices. Here we propose a tunable and polarization-dependent terahertz metamaterial absorber which can work for both linearly and circularly polarized waves. By introducing single layer graphene and vanadium dioxide (VO2), switching between the two working states and wide-range tuning of the absorption efficiency are realized. When VO2 is in insulating state, the absorber shows different tunable absorption performance for the x- or y-polarized terahertz waves, in which the maximum absorption rate is close to 100%. When VO2 is in metallic state, the metasurface behaves as a chiral absorber, and the maximum absorption difference between the two circular polarizations is about 0.45, while the tuning efficiency reaches 86.
55 μm can be achieved. Our results provide design insight toward fully exploiting a single-mode, wide-band, and ultra low-loss HC-ARF. In addition, the extraordinary optical properties of the proposed fiber can be beneficial for several applications such as future optical communication system, high energy light transport, extreme non-nonlinear optics and beyond.Defect inspection on lithographic substrates, masks, reticles, and wafers is an important quality assurance process in semiconductor manufacturing. Coherent Fourier scatterometry (CFS) using laser beams with a Gaussian spatial profile is the standard workhorse routinely used as an in-line inspection tool to achieve high throughput. As the semiconductor industry advances toward shrinking critical dimensions in high volume manufacturing using extreme ultraviolet lithography, new techniques that enable high-sensitivity, high-throughput, and in-line inspection are critically needed. Here we introduce a set of novel defect inspection techniques based on bright-field CFS using coherent beams that carry orbital angular momentum (OAM). One of these techniques, the differential OAM CFS, is particularly unique because it does not rely on referencing to a pre-established database in the case of regularly patterned structures with reflection symmetry. The differential OAM CFS exploits OAM beams with opposite wavefront or phase helicity to provide contrast in the presence of detects. We numerically investigated the performance of these techniques on both amplitude and phase defects and demonstrated their superior advantages-up to an order of magnitude higher in signal-to-noise ratio-over the conventional Gaussian beam CFS. These new techniques will enable increased sensitivity and robustness for in-line nanoscale defect inspection and the concept could also benefit x-ray scattering and scatterometry in general.The optical properties of microlens arrays may be significantly affected by the optical crosstalk effect between adjacent lenses. Recently, this issue has triggered increasing attention in the scientific community. In this study, an integrated microlens array (MLA) consisting of self-aligning convergent waveguides of microlenses was fabricated. The optical crosstalk effect does not influence the performance of such system. Based on the self-focusing effect principle, self-writing of the waveguide array was achieved in a photosensitive polymer. The light collection and guiding performance of the MLA with and without thermal cross-linking treatment was analyzed in depth. The relation between the stray light and the filling rate of the MLA shows that a high filling rate decreases the optical crosstalk. Finally, an integrated MLA with a large area, high uniformity, and excellent optical performance was fabricated.The directional polarimetric camera (DPC) is a polarization sensor with the characteristics of ultra-wide-angle and low-distortion imaging. The multi-angle polarization information is helpful to obtain the spatial distribution of target radiation, and multiple data fusion relies on the non-uniformity calibration of image plane. https://www.selleckchem.com/products/CHR-2797(Tosedostat).html The non-uniformity consists of many factors such as lens, detector assembly, spatial stray light, etc. The single correction method can not distinguish the error source effectively. In consideration of the in-flight operation mode of DPC based on the adjustment of exposure time, the non-uniformity correction method of the detector based on multi parameters is proposed. Through the electro-optical performance measurement system of the CCD detector, the sensitive factors such as temperature, dark current, exposure time and spectral response are obtained. After a series of preprocessing of the image including removal of dark signal, removal of smearing effect and temperature compensation, the non-uniformity calibration based on multi-parameters is imposed on the detector. The low-frequency unbalanced response difference of the image surface is eliminated, and the high-frequency difference is effectively suppressed. The experimental results show that the photo response non-uniformity of 95% full well single frame data is reduced from 2.86% to 0.36%. After correction, the data noise is shown as shot noise, and the detector has good ability of dynamic range adjustment. The non-uniformity calibration by the proposed method can offer data support for the instrumental calibration and in-flight fast calculation, and provide effective reference for the subsequent polarization remote sensing instruments.Deep neural network has been used to compensate the nonlinear distortion in the field of underwater visible light communication (UVLC) system. Considering the tradeoff between the equalization performance and the network complexity is the priority in practical applications. In this paper, we propose a novel hybrid frequency domain aided temporal convolutional neural network (TFCNN) with attention scheme as the post-equalizer in CAP modulated UVLC system. Experiments illustrate that the proposed TFCNN can achieve better equalization performance and remain the bit error rate (BER) below the 7% hard-decision forward error correction (HD-FEC) limit of 3.8×10-3 when other equalizers loss effectiveness under serious distortion condition. Compared with the standard deep neural network, TFCNN shows 76.4% network parameters complexity reduction.Metamaterial absorbers can achieve high-efficiency electromagnetic absorption in a specific band, which have been used in biochemical sensing, photoelectric detection, imaging and other fields. Tunable metamaterial absorbers provide more possibilities for the development of multifunctional electromagnetic absorption devices. Here we propose a tunable and polarization-dependent terahertz metamaterial absorber which can work for both linearly and circularly polarized waves. By introducing single layer graphene and vanadium dioxide (VO2), switching between the two working states and wide-range tuning of the absorption efficiency are realized. When VO2 is in insulating state, the absorber shows different tunable absorption performance for the x- or y-polarized terahertz waves, in which the maximum absorption rate is close to 100%. When VO2 is in metallic state, the metasurface behaves as a chiral absorber, and the maximum absorption difference between the two circular polarizations is about 0.45, while the tuning efficiency reaches 86.
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